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Investigation of the adhesion of NbN coatings deposited by pulsed dc reactive magnetron sputtering using scratch tests / Yasar Totik in JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH, Vol. 7, N° 4 (07/2010)
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Titre : Investigation of the adhesion of NbN coatings deposited by pulsed dc reactive magnetron sputtering using scratch tests Type de document : texte imprimé Auteurs : Yasar Totik, Auteur Année de publication : 2010 Article en page(s) : p.485-492 Note générale : Bibliogr. Langues : Américain (ame) Catégories : Adhésion
Essais de résilience
Magnétron
Pulvérisation cathodique
Revêtements:PeintureTags : Revêtement 'Nitrure de niobium' Adhésion 'Test au choc' 'Pulvérisation par magnétron' 'Testeur progressif zéro charge' PLST 'Microscopie électronique balayage' SEM patch multi-test' MPST Index. décimale : 667.9 Revêtements et enduits Résumé : Scratch tests have been used to investigate the adhesion of niobium nitride (NbN) coatings that were deposited by pulsed dc reactive magnetron sputtering at target currents of 1.5, 2.5, and 3.5 A onto M2 tool steel and silicon wafer. The coating adhesion on each material substrate was investigated using a progressive load scratch tester (PLST) and a multi-pass scratch tester (MPST). Microhardness tests and scanning electron microscopy (SEM) were also used to examine the hardness and microstructure of the NbN coatings. These results have indicated that the structural, mechanical, and adhesion properties of the NbN coatings improve with increasing target currents. While performing PLST and MPST tests, the highest adhesion and lowest friction force were obtained for the coatings deposited at a target current of 3.5 A. In addition, the triboscobic behaviors that were observed from the MPST of the coatings indicated that the target currents affect the friction behavior of the coatings. DOI : 10.1007/s11998-009-9200-6 En ligne : https://link.springer.com/content/pdf/10.1007%2Fs11998-009-9200-6.pdf Format de la ressource électronique : Permalink : https://e-campus.itech.fr/pmb/opac_css/index.php?lvl=notice_display&id=9771
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