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Investigation of the adhesion of NbN coatings deposited by pulsed dc reactive magnetron sputtering using scratch tests / Yasar Totik in JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH, Vol. 7, N° 4 (07/2010)

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inJOURNAL OF COATINGS TECHNOLOGY AND RESEARCH > Vol. 7, N° 4 (07/2010) . - p.485-492

Titre :	Investigation of the adhesion of NbN coatings deposited by pulsed dc reactive magnetron sputtering using scratch tests
Type de document :	texte imprimé
Auteurs :	Yasar Totik, Auteur
Année de publication :	2010
Article en page(s) :	p.485-492
Note générale :	Bibliogr.
Langues :	Américain (ame)
Catégories :	Adhésion Essais de résilience Magnétron Pulvérisation cathodique Revêtements:Peinture
Tags :	Revêtement 'Nitrure de niobium' Adhésion 'Test au choc' 'Pulvérisation par magnétron' 'Testeur progressif zéro charge' PLST 'Microscopie électronique balayage' SEM patch multi-test' MPST
Index. décimale :	667.9 Revêtements et enduits
Résumé :	Scratch tests have been used to investigate the adhesion of niobium nitride (NbN) coatings that were deposited by pulsed dc reactive magnetron sputtering at target currents of 1.5, 2.5, and 3.5 A onto M2 tool steel and silicon wafer. The coating adhesion on each material substrate was investigated using a progressive load scratch tester (PLST) and a multi-pass scratch tester (MPST). Microhardness tests and scanning electron microscopy (SEM) were also used to examine the hardness and microstructure of the NbN coatings. These results have indicated that the structural, mechanical, and adhesion properties of the NbN coatings improve with increasing target currents. While performing PLST and MPST tests, the highest adhesion and lowest friction force were obtained for the coatings deposited at a target current of 3.5 A. In addition, the triboscobic behaviors that were observed from the MPST of the coatings indicated that the target currents affect the friction behavior of the coatings.
DOI :	10.1007/s11998-009-9200-6
En ligne :	https://link.springer.com/content/pdf/10.1007%2Fs11998-009-9200-6.pdf
Format de la ressource électronique :	Pdf
Permalink :	https://e-campus.itech.fr/pmb/opac_css/index.php?lvl=notice_display&id=9771

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