Reduction in edge beading defects using two-axis spin coating technology : an analytical, numerical, and experimental study / Soroosh Mahmoodi in JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH, Vol. 20, N° 5 (09/2023)  

[article]  inJOURNAL OF COATINGS TECHNOLOGY AND RESEARCH > Vol. 20, N° 5 (09/2023) . - p. 1759-1771 Titre : Reduction in edge beading defects using two-axis spin coating technology : an analytical, numerical, and experimental study Type de document : texte imprimé Auteurs : Soroosh Mahmoodi, Auteur ; David E. Weidner, Auteur Année de publication : 2023 Article en page(s) : p. 1759-1771 Note générale : Bibliogr. Langues : Américain (ame) Catégories : Bordure -- Défauts Gravité Mouvement rotatoire Résines photosensibles Revêtement par centrifugation Index. décimale : 667.9 Revêtements et enduits Résumé : Spin coating is used by several industries to apply thin but uniform liquid films to a given substrate. While this method produces very uniform coatings over much of the substrate, near the periphery of the substrate, defects in the coating, sometimes referred to as edge beading, often occur. This paper explores the usage of a two-axis spin coating technology that leads to a more uniform film thickness near the edge of the substrate. By rotating the substrate on an axis parallel to the substrate, centrifugal forces are generated that act both normal and parallel to the substrate. These forces are known as elevated gravity and act to even out any existing coating irregularities and also to drain liquid toward the edge of the substrate. This study investigates the effect of elevated gravity on the coating dynamics of a photoresist liquid film on a circular silicon wafer. Using lubrication theory, we derive a modified evolution equation that includes the effects of elevated gravity. We solve this equation numerically using implicit finite differences. Four layers of a photoresist film are spin coated on 3-inch circular wafers using a two-axes spin technology under various elevated gravity conditions. The thickness of the dried coating layers near the periphery of the substrate is measured using a SEM device. Both the experiments and the simulations show that edge beading defects can be substantially reduced for the 500g elevated gravity case compared to the normal 1g gravity case. Note de contenu : - Mathematical model of fluid properties - Nondimensionalization - Numerical aspects - Experimental aspects - Results : Parameters used in simulation and experiments - Evolution of the coating layer in 1g environment - Evolution of the coating layer due to enhanced gravity effects - Table 1 : Physiochemical properties of our model photoresist film - Table 2 : Relationship between the rotation rate and elevated gravity DOI : https://doi.org/10.1007/s11998-023-00779-2 En ligne : https://link.springer.com/content/pdf/10.1007/s11998-023-00779-2.pdf?pdf=button% [...] Format de la ressource électronique : Pdf Permalink : https://e-campus.itech.fr/pmb/opac_css/index.php?lvl=notice_display&id=39986 [article]

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Two-dimensional spin coating with a vertical centrifugal force and the effect of artificial gravity on surface leveling / Soroosh Mahmoodi in JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH, Vol. 13, N° 6 (11/2016)  

[article]  inJOURNAL OF COATINGS TECHNOLOGY AND RESEARCH > Vol. 13, N° 6 (11/2016) . - p. 1123-1137 Titre : Two-dimensional spin coating with a vertical centrifugal force and the effect of artificial gravity on surface leveling Type de document : texte imprimé Auteurs : Soroosh Mahmoodi, Auteur ; Hu Guoqing, Auteur ; Mehrdad Nouri Khajavi, Auteur Année de publication : 2016 Article en page(s) : p. 1123-1137 Note générale : Bibliogr. Langues : Américain (ame) Catégories : Résines photosensibles Revêtement par centrifugation Tags : 'Lissage  de  surface  lisse'  'Force  centrifuge  verticale'  Photorésist  'Couche  condensée' Index. décimale : 667.9 Revêtements et enduits Résumé : This study focuses on an innovative method for spin coating called the two-dimensional (2D) spin coating method. Using a centrifugal force applied by a rotary machine perpendicular to the wafer surface body, a vertical centrifuge force (VCF) was generated. The VCF allowed controllable artificial gravity acceleration to be generated and caused the coating to face this elevated gravity acceleration to adjust and normalize the high and low surface tension stresses. Previous surface leveling mathematics were analyzed and modified. The modified calculations indicate that the effect of additional gravity exerted on the liquid’s surface can reduce the amplitude of surface leveling. To experimentally investigate this phenomenon, a 2D spin coater was designed and manufactured. Higher artificial gravity overcame some common coating defects, such as cloudiness, edge beading, inner layer bubbling, and unsmooth surface leveling. Photoresist (AZP4620) was used as the coating material. The surface roughness was analyzed by atomic force microscopy (AFM) and the layer properties were also imaged by scanning electron microscopy (SEM). The AFM results (average and root-mean-square roughness) indicated a decrease in surface leveling amplitude by increasing the VCF. SEM images showed condensed layers without any porosity or rupture. The experimental results agreed with the simulations and calculated values. Note de contenu : - DESCRIPTION OF THE 2D SPIN COATING METHOD : G acceleration and relative centrifugal force mathematics - Coating material (photoresist AZP4620) - Surface leveling mathematics DOI : 10.1007/s11998-016-9823-3 En ligne : http://link.springer.com/content/pdf/10.1007%2Fs11998-016-9823-3.pdf Format de la ressource électronique : Pdf Permalink : https://e-campus.itech.fr/pmb/opac_css/index.php?lvl=notice_display&id=27270 [article]

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