Analysis of the isothermal compression in nanoimprint lithography assuming a power-law fluid / I.-C. Hsin in INTERNATIONAL POLYMER PROCESSING, Vol. XXIII, N° 1 (03/2008)  

[article]  inINTERNATIONAL POLYMER PROCESSING > Vol. XXIII, N° 1 (03/2008) . - p. 24-29 Titre : Analysis of the isothermal compression in nanoimprint lithography assuming a power-law fluid Type de document : texte imprimé Auteurs : I.-C. Hsin, Auteur ; W.-B. Young, Auteur Année de publication : 2008 Article en page(s) : p. 24-29 Note générale : Bibliogr. Langues : Anglais (eng) Index. décimale : 668.9 Polymères Résumé : One of the choices for defining a nano pattern in micro fabrication is to use the nanoimprint lithography. This method is also known as a hot embossing lithography due to its inherited process technique from the compression process. It is important to determine the appropriate conditions of pressure, temperature, and time in the nanoimprint lithography process. To determine the right conditions for nanoimprint lithography, one has to understand the polymer flow behavior during the imprinting process. In this study, a simplified analytical model was developed based on a power-law fluid to predict the polymer flow during the imprinting process. Under a constant imprint force, the imprint depth on a polymer film can be predicted using this model. Experimental tests were also conducted to verify the results. It was demonstrated that the model can provide reasonable results on the imprint depth. DOI : 10.3139/217.1008 En ligne : https://drive.google.com/file/d/1YVKt8BLd5pJKB0euqx0Ysd-Puu3PiC8a/view?usp=drive [...] Format de la ressource électronique : Pdf Permalink : https://e-campus.itech.fr/pmb/opac_css/index.php?lvl=notice_display&id=2657 [article]

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