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Ir coating prepared on Mo substrate by double glow plasma / Wang Liangbing in JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH, Vol. 6, N° 4 (12/2009)
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Titre : Ir coating prepared on Mo substrate by double glow plasma Type de document : texte imprimé Auteurs : Wang Liangbing, Auteur ; Zhaofeng Chen, Auteur ; Pingze Zhang, Auteur ; Wangping Wu, Auteur ; Ying Zhang, Auteur Année de publication : 2009 Article en page(s) : p. 517-522 Note générale : Bibliogr. Langues : Américain (ame) Index. décimale : 667.9 Revêtements et enduits Résumé : Dense and adherent Ir coating was obtained on the surface of the Mo substrate by double glow plasma, which had a deposition chamber and two cathodes. Argon gas was used as the working gas. The bias voltage of Ir target and Mo substrate were -800 and -300 V, respectively. The chamber pressure was 35 Pa. Microstructure of the Ir coating was observed by scanning electron microscopy. The Ir coating had a polycrystalline structure with preferential growth orientation of (220) crystal plane. The deposition rate was ~3.5 µm/h. The good adhesion resulted from the buffer layer between the Mo substrate and the Ir coating. The buffer layer, a combined Ir and Mo, was formed at the beginning of the deposition. The Mo concentration distributed gradiently along the depth of the buffer layer. DOI : 10.1007/s11998-008-9123-7 En ligne : https://link.springer.com/content/pdf/10.1007%2Fs11998-008-9123-7.pdf Format de la ressource électronique : Permalink : https://e-campus.itech.fr/pmb/opac_css/index.php?lvl=notice_display&id=7695
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